๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Design and Fabrication of Absorber Coupled TES Microbolometers on Continuous Silicon-Nitride Windows

โœ Scribed by Clarence L. Chang; John E. Carlstrom; Aaron Datesman; Stephan S. Meyer; Valentyn Novosad; Volodymyr G. Yefremenko; Tom Crawford; Tom Downes; Jeff McMahon; Kathryn Miknaitis; Joaquin D. Vieira


Book ID
106418381
Publisher
Springer US
Year
2008
Tongue
English
Weight
326 KB
Volume
151
Category
Article
ISSN
0022-2291

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Design and fabrication of integrated fil
โœ Jae Yoeng Park; Hee Chul Lee; Seong Jong Cheon ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 709 KB

## Abstract In this paper, fully integrated film bulk acoustic resonators (FBARs) and filter have been designed, fabricated, and characterized by using silicon bulk micromachining technology. The fabricated resonator is comprised of aluminum nitride (AlN) piezoelectric material sandwiched by two mo