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Design and fabrication of a single membrane push-pull SPDT RF MEMS switch operated by electromagnetic actuation and electrostatic hold

✍ Scribed by Cho, Il-Joo; Yoon, Euisik

Book ID: 127237689
Publisher: Institute of Physics
Year: 2010
Tongue: English
Weight: 826 KB
Volume: 20
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/20/3/035028

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[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (Jan. 30 - Feb. 3, 2005)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold

✍ Il-Joo Cho, ; Taeksang Song, ; Sang-Hyun Baek, ; Euisik Yoon, 📂 Article 📅 2005 🏛 IEEE 🌐 English ⚖ 764 KB