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Design and fabrication of a negative microlens array

✍ Scribed by Ying Huang; Ran Liu; Jianjun Lai; Xin-jian Yi

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
444 KB
Volume
40
Category
Article
ISSN
0030-3992

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## Abstract A systematic approach to achieving high quality gapless microlens array fabrication using the incomplete developing and thermal reflow process was developed in this study. The experimental results proved that a hexagonal microlens array with a maximum 100% fill‐factor could be successfu