Design and fabrication of a micro PZT cantilever array actuator for applications in fluidic systems

✍ Scribed by Hyonse Kim; Chihyun In; Gilho Yoon; Jongwon Kim

• Publisher: Springer-Verlag
• Year: 2005
• Tongue: English
• Weight: 769 KB
• Volume: 19
• Category: Article
• ISSN: 1738-494X
• DOI: 10.1007/bf03023932