✦ LIBER ✦
Design and fabrication of a high-aspect-ratio parylene-based comb-drive actuator for large displacements at a low driving force
✍ Scribed by Kuo, Wen-Cheng; Chen, Chen-Wei; Liu, Chih-Ming
- Book ID
- 126461513
- Publisher
- Institute of Physics
- Year
- 2013
- Tongue
- English
- Weight
- 999 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0960-1317
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