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Design and characterization of in-plane MEMS yaw rate sensor

✍ Scribed by Venkatesh, K. P. (author);Patil, Nishad (author);Pandey, Ashok Kumar (author);Pratap, Rudra (author)

Publisher: Indian Academy of Sciences
Year: 2009
Tongue: English
Weight: 506 KB
Volume: 34
Category: Article
ISSN: 0256-2499
DOI: 10.1007/s12046-009-0027-8

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