✦ LIBER ✦
Design and capabilities of a cluster implantation and deposition apparatus: First results on hillock formation under energetic cluster ion bombardment
✍ Scribed by Popok, V. N.; Prasalovich, S. V.; Samuelsson, M.; Campbell, E. E. B.
- Book ID
- 115458969
- Publisher
- American Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 769 KB
- Volume
- 73
- Category
- Article
- ISSN
- 0034-6748
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