Design and analysis of a twisting-type thermal actuator for micromirrors
β Scribed by Dong Hyun Kim; Kyung Su Oh; Seungho Park
- Book ID
- 107624580
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 409 KB
- Volume
- 23
- Category
- Article
- ISSN
- 1738-494X
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