โฆ LIBER โฆ
Description of the porosity of inhomogeneous porous low-k films using solvent adsorption studied by spectroscopic ellipsometry in the visible range
โ Scribed by A. Bourgeois; A. Brunet Bruneau; V. Jousseaume; N. Rochat; S. Fisson; B. Demarets; J. Rivory
- Book ID
- 113936688
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 123 KB
- Volume
- 455-456
- Category
- Article
- ISSN
- 0040-6090
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