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Description of the porosity of inhomogeneous porous low-k films using solvent adsorption studied by spectroscopic ellipsometry in the visible range

โœ Scribed by A. Bourgeois; A. Brunet Bruneau; V. Jousseaume; N. Rochat; S. Fisson; B. Demarets; J. Rivory


Book ID
113936688
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
123 KB
Volume
455-456
Category
Article
ISSN
0040-6090

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