✦ LIBER ✦
Description of a hybrid PECVD-PVD process: Application to Zn–Si–O and Ti–Si–O composites thin films
✍ Scribed by A. Daniel; T. Duguet; T. Belmonte
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 524 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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