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Depth-sensing indentation modeling for determination of Elastic modulus of thin films

✍ Scribed by A. Tricoteaux; G. Duarte; D. Chicot; E. Le Bourhis; E. Bemporad; J. Lesage


Book ID
108206684
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
388 KB
Volume
42
Category
Article
ISSN
0167-6636

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Interest in characterizing the mechanical properties of porous materials at micro-/nanometer scales has increased due to recent development of micro-/nanosystems. Depth-sensing indentation (DSI) systems, also referred to as nanoindentation, are strong tools for performing indentation measurements. T