✦ LIBER ✦
Depth profiling with modified dc-Grimm and rf-Grimm-type glow discharges operated with high gas flow rates and coupled to a high-resolution mass spectrometer
✍ Scribed by Jorge Pisonero; Ingo Feldmann; Nerea Bordel; Alfredo Sanz-Medel; Norbert Jakubowski
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 559 KB
- Volume
- 382
- Category
- Article
- ISSN
- 1618-2650
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