✦ LIBER ✦
Depth profiling of ultra-thin oxynitride gate dielectrics by using MCs2+ technique
✍ Scribed by D. Gui; Z.Q. Mo; Z.X. Xing; Y.H. Huang; Y.N. Hua; S.P. Zhao; L.Z. Cha
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 326 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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