Depth profile of the implantation-enhanced intermixing of Ga[sup +] focused ion beam in AlAs/GaAs quantum wells

✍ Scribed by Eshlaghi, Soheyla; Meier, C.; Suter, Dieter; Reuter, D.; Wieck, A. D.

• Book ID: 120160060
• Publisher: American Institute of Physics
• Year: 1999
• Tongue: English
• Weight: 281 KB
• Volume: 86
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.371720