Depth profile measurements of Ptxsix layers by combined SIMS, SNMS, AES and XPS: M Altebockwinkel, W Storm, L Wiedmann and A Benninghoven, Physialisches Institut der Universität, Wilhelm-Klemm-Str 10, D-4400 Münster, FRG

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 198 KB
• Volume: 41
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)94088-8