Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on Si (001)

✍ Scribed by Khanbabaee, B.; Arezki, B.; Biermanns, A.; Cornejo, M.; Hirsch, D.; Lützenkirchen-Hecht, D.; Frost, F.; Pietsch, U.

• Book ID: 120460565
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 862 KB
• Volume: 527
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2012.12.055