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Depth profile determination by ion-induced X-ray spectroscopy

✍ Scribed by Wolfgang Pabst


Publisher
Elsevier Science
Year
1974
Weight
145 KB
Volume
120
Category
Article
ISSN
0029-554X

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X-ray Photoelectron Spectroscopy Depth P
✍ Butcher, K. S. A.; Tansley, T. L.; Li, Xin πŸ“‚ Article πŸ“… 1997 πŸ› John Wiley and Sons 🌐 English βš– 359 KB πŸ‘ 2 views

Aluminium nitride thin Ðlms grown at room temperature on degenerate silicon (conducting) substrates have been studied using XPS. The hydrolysis layer at the surface of the AlN was examined using valence band measurements, and the e †ect of 5 kV argon ion milling used to remove the hydrolysis layer w