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Depth profile analysis of porous Si film by ERDA using a ΔE — E detector telescope

✍ Scribed by DK Avasthi; SK Hui; ET Subramaniyam; BR Mehta

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 451 KB
Volume: 47
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(96)00154-6

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