Depth distributions of low energy deuterium implanted into silicon as determined by sims

✍ Scribed by Charles W. Magee; Samuel A. Cohen; Donald E. Voss; David K. Brice

• Publisher: Elsevier Science
• Year: 1980
• Weight: 332 KB
• Volume: 168
• Category: Article
• ISSN: 0029-554X
• DOI: 10.1016/0029-554x(80)91280-x