✦ LIBER ✦
Deposition profile of Ti film inside a trench and its correlation with gas-phase ionization in high-pressure magnetron sputtering
✍ Scribed by Nafarizal, N.; Takada, N.; Nakamura, K.; Sago, Y.; Sasaki, K.
- Book ID
- 118059811
- Publisher
- AVS (American Vacuum Society)
- Year
- 2006
- Tongue
- English
- Weight
- 493 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0734-2101
No coin nor oath required. For personal study only.