Deposition process of W onto a-Si:H observed in-situ with polarization modulation IR and quadrupole mass spectroscopies

✍ Scribed by T. Wadayama; H. Shibata; T. Ohtani; A. Hatta

• Book ID: 103617407
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 332 KB
• Volume: 78
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(94)90036-1