Deposition of wurtzite type boron nitride layers by reactive pulse plasma crystallization

✍ Scribed by M. SokoŁowski

• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 289 KB
• Volume: 46
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(79)90121-0