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Deposition of thin antireflection coatings based on mesoporous silicon dioxide by the sol-gel method in the presence of carbochain polymers and statistical copolymers

✍ Scribed by B. B. Troitskii; V. N. Denisova; M. A. Novikova; M. A. Lopatin; L. V. Khokhlova; A. E. Golubev

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Preparation of antireflection coatings f

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