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Deposition of silicon oxide hard coatings by low-temperature radio-frequency plasmas

✍ Scribed by Chun Huang; Qingsong Yu

Publisher: John Wiley and Sons
Year: 2010
Tongue: English
Weight: 597 KB
Volume: 116
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.31440

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