✦ LIBER ✦
Deposition of Palladium from a Cylcopentadienyl-allyl-palladium Precursor on Si-Based Substrates with Various Pretreatments: The Role of Surface Si–OH and Si-H Species Studied by X-Ray Photoelectron Spectroscopy
✍ Scribed by Q.-H. Wu; M. Gunia; T. Strunskus; G. Witte; M. Muhler; C. Wöll
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 398 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0948-1907
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