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Deposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures

✍ Scribed by May, P.W.; Smith, J.A.; Mankelevich, Yu. A.


Book ID
120256408
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
290 KB
Volume
15
Category
Article
ISSN
0925-9635

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