✦ LIBER ✦
Deposition of mechanically hard amorphous carbon nitride films from decomposition of BrCN. Effects of substrate cooling and pulsed rf-bias voltage
✍ Scribed by H. Ito; K. Hori; H. Saitoh
- Book ID
- 116668960
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 233 KB
- Volume
- 352
- Category
- Article
- ISSN
- 0022-3093
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