✦ LIBER ✦
Deposition of Me-C: H coatings from metal organic precursors using a plasma-activated r.f. process
✍ Scribed by C. Benndorf; J.T. Harnack; U. Fell
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 542 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0257-8972
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