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Deposition of mass-selected cluster ions using a pulsed arc cluster-ion source

✍ Scribed by B. Klipp; M. Grass; J. Müller; D. Stolcic; U. Lutz; G. Ganteför; T. Schlenker; J. Boneberg; P. Leiderer


Book ID
106024124
Publisher
Springer
Year
2001
Tongue
English
Weight
704 KB
Volume
73
Category
Article
ISSN
1432-0630

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The performance of a new pulsed arc cluster ion source (PACIS) is demonstrated for pure metal cluster ions and anions as well as mixed metal-rare-gas clusters. Pure metal clusters like W$ exhibit intensity distributions similar to those from laser vaporization sources. The ion current of the PACIS i