✦ LIBER ✦
Deposition of luminescent a-SiNx:H Films with SiH4–N2gas mixture by VHF–PECVD using novel impedance matching method
✍ Scribed by S. Kobayashi; N. Ohrui; Y. C. Chao; T. Aoki; H. Kobayashi; T. Asakawa
- Book ID
- 106397657
- Publisher
- Springer US
- Year
- 2007
- Tongue
- English
- Weight
- 342 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0957-4522
No coin nor oath required. For personal study only.