Deposition of LaMO3 (M=Co, Cr, Al) films by spray pyrolysis in inductively coupled plasma

✍ Scribed by Hiromichi Ichinose; Hiroaki Katsuki; Masamitsu Nagano

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 567 KB
• Volume: 144
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)90010-8