Deposition of intrinsic hydrogenated amorphous silicon for thin-film solar cells – a comparative study for layers grown statically by RF-PECVD and dynamically by VHF-PECVD

✍ Scribed by T. Zimmermann; A. J. Flikweert; T. Merdzhanova; J. Woerdenweber; A. Gordijn; U. Rau; F. Stahr; K. Dybek; J. W. Bartha

• Book ID: 112174825
• Publisher: John Wiley and Sons
• Year: 2012
• Tongue: English
• Weight: 455 KB
• Volume: 22
• Category: Article
• ISSN: 1062-7995
• DOI: 10.1002/pip.2254