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Deposition of highly oriented Bi12SiO20 thin films on Y-stabilized zirconia and SiO2 by pulsed-laser deposition

✍ Scribed by T. Okada; F. Yahiro; H. Uetsuhara; Y. Nakata; M. Maeda; S. Higuchi; K. Ueda


Publisher
Springer
Year
1999
Tongue
English
Weight
145 KB
Volume
69
Category
Article
ISSN
1432-0630

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Highly oriented layer-structured erbium monosilicate (Er 2 SiO 5 ) films have been formed by the pulsed laser deposition technique. Er and Si are alternately deposited in a oxygen atmosphere on Si substrates by computer-controlled deposition so that the ratio of Er and Si becomes 2:1 and one cycle o