Deposition of high-Tc superconducting Y-Ba-Cu-O thin films at low temperatures using a plasma-enhanced organometallic chemical vapor deposition approach

✍ Scribed by Jing Zhao; Henry O. Marcy; Lauren M. Tonge; Bruce W. Wessels; Tobin J. Marks; Carl R. Kannewurf

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 316 KB
• Volume: 74
• Category: Article
• ISSN: 0038-1098
• DOI: 10.1016/0038-1098(90)90716-o