Deposition of hard carbon films by the r.f. glow discharge method: Kenji Kobayashi et al,Thin Solid Film,158, 1988, 233–238

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 150 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90818-x