✦ LIBER ✦

Deposition of Cu–Mn alloy film from supercritical carbon dioxide for advanced interconnects

✍ Scribed by Zhao, Bin; Zhang, Yanfei; Yang, Junhe

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Alcohol-Assisted Deposition of Copper Fi

✍ Albertina Cabanas; Xiaoying Shan; James J. Watkins 📂 Article 📅 2003 🏛 John Wiley and Sons ⚖ 57 KB

## Abstract For Abstract see ChemInform Abstract in Full Text.

Deposition of Gold Films and Nanostructu

✍ Cabañas, Albertina; Long, David P.; Watkins, James J. 📂 Article 📅 2004 🏛 American Chemical Society 🌐 English ⚖ 222 KB

Reactive Deposition of Conformal Rutheni

✍ O'Nei, Adam; Watkins, James J. 📂 Article 📅 2006 🏛 American Chemical Society 🌐 English ⚖ 479 KB

Reactive Deposition of Conformal Metal O

✍ O'Nei, Adam; Watkins, James J. 📂 Article 📅 2007 🏛 American Chemical Society 🌐 English ⚖ 585 KB

Deposition of Conformal Copper and Nicke

✍ Blackburn, J. M. 📂 Article 📅 2001 🏛 American Association for the Advancement of Scienc 🌐 English ⚖ 318 KB

Reactive Deposition of Conformal Palladi

✍ Blackburn, Jason M.; Long, David P.; Watkins, James J. 📂 Article 📅 2000 🏛 American Chemical Society 🌐 English ⚖ 375 KB