Deposition of CrSiN/AlTiSiN nano-multilayer coatings by multi-arc ion plating using gas source silicon

✍ Scribed by Yan, Shaojian; Fu, Tongcheng; Wang, Ruyi; Tian, Canxin; Wang, Zesong; Huang, Zhihong; Yang, Bing; Fu, Dejun

• Book ID: 121381994
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 727 KB
• Volume: 307
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2013.01.084