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Deposition of coatings containing quasicrystalline AlCuFeB and β phase by magnetron sputtering

✍ Scribed by W. Vollnhofer; C. Eisenmenger-Sittner; G. Mozdzen; E. Neubauer

Book ID
119374125
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
875 KB
Volume
211
Category
Article
ISSN
0257-8972

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## Carbon-containing tungsten coatings were deposited by magnetron sputtering onto AISI 316 stainless steel substrates in A&H, gas mixtures. Optical emission spectroscopy was used to control the C,H, gas flow. The goal of this investigation was to study the influence of the carbon content in W,_,C,