Deposition of boroncarbonnitrogen layers from a single source precursor : R. Weissenbacher, R. Haubner. (University of Technology, Vienna, Austria.) Int. J. Refract. Metal/Hard Mater, Vol 20, No 2, 2002, 135–141

• Book ID: 114068389
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 317 KB
• Volume: 58
• Category: Article
• ISSN: 0026-0657
• DOI: 10.1016/s0026-0657(03)80323-5