✦ LIBER ✦
Deposition of boron doped a-Si:H films by a novel combination of rf glow discharge technique and filament heating: Enhancement of doping efficiency
✍ Scribed by Debabrata Das; S.N. Sharma; T.K. Bhattacharyya; S. Chattopadhyay; A.K. Barua; Ratnabali Banerjee
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 594 KB
- Volume
- 97
- Category
- Article
- ISSN
- 0038-1098
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