Deposition of boron-carbon-nitrogen coatings by hot filament and plasma activation: B.Lux et al. (University of Technology, Vienna, Austria.)

• Book ID: 117184603
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 130 KB
• Volume: 53
• Category: Article
• ISSN: 0026-0657
• DOI: 10.1016/s0026-0657(98)80092-1