✦ LIBER ✦
Deposition of a-Si: H films by ECR plasma CVD using large diameter multi-slot antennae
✍ Scribed by Yoko Ueda; Hideaki Teranishi; Masayoshi Tanaka; Shunjiro Shinohara; Yoshinobu Kawai
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 338 KB
- Volume
- 74-75
- Category
- Article
- ISSN
- 0257-8972
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