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Deposition and surface treatment of Ag-embedded indium tin oxide by plasma processing

✍ Scribed by Kim, Jun Young; Kim, Jae-Kwan; Kim, Ja-Yeon; Kwon, Min-Ki; Yoon, Jae-Sik; Lee, Ji-Myon

Book ID
122366351
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
803 KB
Volume
547
Category
Article
ISSN
0040-6090

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✍ Zuqiang Qi; Xuekang Chen; Chuizhen Fan; Weiping Chai πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 425 KB

Indium-tin-oxide (ITO) thin films and ITO/Ag alloy/ITO multilayered thin films were deposited on glass substrates using a vertical in-line multilayer sputtering system. Ceramic ITO targets were used for the deposition of ITO layers at low substrate temperature of 100 β€’ C. It was observed that the s