✦ LIBER ✦
Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150°C
✍ Scribed by Rangarajan, Balaji; Kovalgin, Alexey Y.; Schmitz, Jurriaan
- Book ID
- 123146872
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 398 KB
- Volume
- 230
- Category
- Article
- ISSN
- 0257-8972
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