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Deposition and properties of germanium-carbon alloy films produced from tetraethylgermanium in an r.f. discharge

✍ Scribed by M. Gazicki; K. Pirker; R. Schallauer; W. Fallmann; F. Olcaytug; G. Urban; A. Jachimowicz; F. Kohl


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
616 KB
Volume
187
Category
Article
ISSN
0040-6090

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