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Deposition and properties of a-Si:H by cylindrical diode glow discharge

✍ Scribed by K. Tsuji; S. Minomura; T. Hiraga; A. Sekiguchi; M. Nagasaka


Book ID
118332048
Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
166 KB
Volume
59-60
Category
Article
ISSN
0022-3093

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