Deposition and monitoring apparatus for preparing passive micro-circuits: W Steckelmacheret al, Trans 10 AVS Nat Vac Symp, MacMillan& Co, 1963, p 415.

• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 57 KB
• Volume: 15
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(65)91594-0