Deposition and characterization of silica-based films by helicon-activated reactive evaporation applied to optical waveguide fabrication

✍ Scribed by Bulla, Douglas A. P. ;Li, Wei-Tang ;Charles, Christine ;Boswell, Rod ;Ankiewicz, Adrian ;Love, John

• Book ID: 115351453
• Publisher: The Optical Society
• Year: 2004
• Tongue: English
• Weight: 322 KB
• Volume: 43
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.43.002978