Deposition and characterization of magnetron sputtered aluminum and aluminum alloy films : Walter H. Class. Solid St. Technol. p. 61 (June 1979)

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 137 KB
• Volume: 20
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(80)90353-4