Dependence of tracking error characteristics of in-line-type differential push-pull methods on arrangement error of segmented gratings

✍ Scribed by Masahisa Shinoda; Kenya Nakai

• Publisher: Optical Society of Japan
• Year: 2011
• Tongue: English
• Weight: 1019 KB
• Volume: 18
• Category: Article
• ISSN: 1340-6000
• DOI: 10.1007/s10043-011-0071-6